Tailored etching processes for UV-NIL resist material for Si-antireflective surfaces

The Optical Properties of 'Moth Eye' Antireflection Surfaces

S.J. Wilson, M.C. Hutley · Optica Acta International Journal of Optics · 1982 · 632 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow

Arne Schleunitz, Helmut Schift · Journal of Micromechanics and Microengineering · 2010 · 95 citations

Engineering, Materials Engineering, Materials Science +10

Wafer scale patterning by soft UV-Nanoimprint Lithography

Ulrich Plachetka · Microelectronic Engineering · 2004 · 82 citations

Engineering, Materials Engineering, Materials Science +14

Amplitude Self-modulation of Intracavity Second-harmonic Generation

P. Mandel, Thomas Erneux · Optica Acta International Journal of Optics · 1982 · 49 citations

Natural Sciences, Physics, Computational Physics +16

3D structures for UV-NIL template fabrication with grayscale e-beam lithography

Guido Piaszenski, Ulrich Barth, Axel Rudzinski et al. · Microelectronic Engineering · 2007 · 35 citations

Engineering, Materials Engineering, Materials Science +12