Influence of tilt moiré fringe on alignment accuracy in proximity lithography

XII. <i>On the manufacture and theory of diffraction-gratings</i>

Lord Rayleigh · The London Edinburgh and Dublin Philosophical Magazine and Journal of Science · 1874 · 186 citations

Natural Sciences, Physics, Optical Materials +10

Sub-20-nm Alignment in Nanoimprint Lithography Using Moiré Fringe

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Engineering, Manufacturing Engineering, Materials Science +13

CCD-area-based autocollimator for precision small-angle measurement

Jie Yuan, Xingwu Long · Review of Scientific Instruments · 2003 · 73 citations

Engineering, Mechatronics Engineering, Digital Imaging +16

Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography

Shaolin Zhou, Yongqi Fu, Xiaoping Tang et al. · Optics Express · 2008 · 72 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Photolithographic Mask Alignment Using Moiré Techniques

Matt King, Donald H. Berry · Applied Optics · 1972 · 64 citations

Engineering, Materials Engineering, Materials Science +17