Publication | Closed Access
Influence of tilt moiré fringe on alignment accuracy in proximity lithography
32
Citations
15
References
2013
Year
Materials ScienceOrganic PhotonicsEngineeringElectron-beam LithographyBeam LithographyMicroscopyMicrofabricationTilt Moiré FringeApplied PhysicsFabrication TechniquePattern TransferAlignment AccuracyMicroelectronicsProximity Lithography3D PrintingNanolithography Method
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