Surface Science · 2000 · 133 citations · 27 references
Natural SciencesChemistryMaterials SciencePhysical ChemistrySurface ChemistrySurface ScienceAtomic Layer DepositionCatalytic MaterialsSurface CatalysisSurface Chemistry Of SolidsSurface ModificationSurface ReactionsAtomic Layer Deposition InterfacesAtomic Layer Deposition KineticsAtomic Layer Deposition PrecursorsSurface Chemistry Of SilicaSurface GrowthSurface Reaction MechanismsSurface Reaction Pathways
27
Excimers and Exciplexes of Conjugated Polymers
Samson A. Jenekhe, John A. Osaheni · Science · 1994 · 1.3K citations
Surface Chemistry for Atomic Layer Growth
Steven M. George, A. W. Ott, J. W. Klaus · The Journal of Physical Chemistry · 1996 · 676 citations
Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry
A. W. Ott, J. W. Klaus, J. M. Johnson et al. · Thin Solid Films · 1997 · 512 citations
Growth of titanium dioxide thin films by atomic layer epitaxy
Mikko Ritala, Markku Leskelä, E. Nykänen et al. · Thin Solid Films · 1993 · 307 citations
Natural Sciences, Materials Engineering, Materials Science +14
C. H. L. Goodman, M. Pessa · Journal of Applied Physics · 1986 · 294 citations
Natural Sciences, Materials Engineering, Materials Science +17