Concepedia

Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors

Korbinian Kunz, Peter Enoksson, Göran Stemme

Sensors and Actuators A Physical · 2001 · 85 citations · 3 references

DOI

Concepts

References

3

The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films

J. Shepard, Paul Moses, Susan Trolier‐McKinstry · Sensors and Actuators A Physical · 1998 · 192 citations

, , +12

Modeling the mechanical behavior of bulk-micromachined silicon accelerometers

R.P. van Kampen, R.F. Wolffenbuttel · Sensors and Actuators A Physical · 1998 · 122 citations

, , +14

Fabrication and characterization of a piezoelectric accelerometer

R. de Reus, Jens Ole Gulløv, P.R. Scheeper · Journal of Micromechanics and Microengineering · 1999 · 60 citations

, , +17