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Micro-optical elements fabricated by electron-beam lithography and dry etching technique using top conductive coatings
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Citations
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References
2001
Year
Materials ScienceMicro-optical ElementsOptical MaterialsEngineeringElectron-beam LithographyBeam LithographyMicrofabricationApplied PhysicsDry Etching TechniqueMicro-optical ComponentMicroelectronicsPlasma EtchingOptoelectronicsNanolithography Method
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