Concepedia

Publication | Closed Access

Development of internal-antenna-driven large-area RF plasma sources using multiple low-inductance antenna units

DOI

103

Citations

19

References

2003

Year

Yuichi Setsuhara, T. Shoji, Akinori Ebe, So Baba, Naoto Yamamoto, Kazuo Takahashi, Koji Ono, Shoji Miyake
Surface and Coatings Technology

References

YearCitations

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