Plasma production by helicon waves

Abstract

High density plasma production using m=+1 and m=-1 helicon waves is studied. Characteristics of cylindrical helicon waves including effects of a vacuum gap between the plasma and the conducting wall and of a non-uniform density profile are presented. The m=+1 and m=-1 helicon modes are separately excited by a helical antenna, and the dependences of plasma density and antenna loading resistance on RF power are different for these modes.