Akinori Ebe

Development of internal-antenna-driven large-area RF plasma sources using multiple low-inductance antenna units

Yuichi Setsuhara, T. Shoji, Akinori Ebe et al. · Surface and Coatings Technology · 2003 · 103 citations

Electrical Engineering, Engineering, Antenna +5

Large-Area and High-Speed Deposition of Microcrystalline Silicon Film by Inductive Coupled Plasma using Internal Low-Inductance Antenna

Eiji Takahashi, Yasuaki Nishigami, Atsushi Tomyo et al. · Japanese Journal of Applied Physics · 2007 · 69 citations

Engineering, Integrated Circuits, Thin Film Process Technology +16

Production and Control of Large-Area Plasmas for Meters-Scale Flat-Panel-Display Processing with Multiple Low-Inductance Antenna Modules

Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe et al. · Plasma Processes and Polymers · 2007 · 67 citations

Properties of carbon nitride thin films prepared by ion and vapor deposition

J.F.D. Chubaci, Tetsuo Sakai, Toshio Yamamoto et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 61 citations

Materials Science, Engineering, Surface Science +8

Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units

Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka et al. · Japanese Journal of Applied Physics · 2006 · 59 citations

Plasma Electronics, Lia Units, Engineering +12