Concepedia

Kazuaki Nishisaka

KN

5

Publications

206

Citations

5

H-Index

2006

Active since

Affiliations

The University of Osaka(Current)

Kazuaki Nishisaka is an author at The University of Osaka specializing in plasma science, engineering, and electrical engineering.

Top concepts

EngineeringPlasma ScienceAntennaPlasma PhysicsElectrical EngineeringPlasma TheoryPlasma SimulationPlasma ConfinementPlasma DiagnosticsCosmic Ray

Publications per year

2006–2008

5

Publications

5

Production and Control of Large-Area Plasmas for Meters-Scale Flat-Panel-Display Processing with Multiple Low-Inductance Antenna Modules

Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe et al. · Plasma Processes and Polymers · 2007 · 67 citations

Characterization of Inductively-Coupled RF Plasma Sources with Multiple Low-Inductance Antenna Units

Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka et al. · Japanese Journal of Applied Physics · 2006 · 59 citations

Plasma Electronics, Lia Units, Engineering +12

Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units

Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka et al. · Japanese Journal of Applied Physics · 2008 · 39 citations

Ar Pressure, Electrical Engineering, Ion Energy Analyzer +7

Development of Large Area Plasma Reactor Using Multiple Low-Inductance Antenna Modules for Flat Panel Display Processing

Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2007 · 23 citations

Lia Modules, Electrical Engineering, Profile Control Capabilities +11

Properties of Inductively-Coupled Plasmas Driven by Multiple Low-Inductance Internal-Antenna Units

Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka et al. · Plasma Processes and Polymers · 2007 · 18 citations · Full text

Multiple Low-inductance Antenna, Electrical Engineering, Plasma Electronics +15

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