Concepedia

The role of hydrogen in silicon nitride and silicon oxynitride films

D. Schalch, A. Scharmann, Robert Wolfrat

Thin Solid Films · 1985 · 30 citations · 6 references

DOI

Concepts

References

6

Comparison of properties of dielectric films deposited by various methods

W. A. Pliskin · Journal of Vacuum Science and Technology · 1977 · 484 citations

, , +17

Optical properties, band gap, and surface roughness of Si3N4

J. Bauer · physica status solidi (a) · 1977 · 116 citations

, , +17

Determination of the Refractive Index of Thin Dielectric Films*

Michael Hacskaylo · Journal of the Optical Society of America · 1964 · 58 citations

, , +16

IR Study of Amorphous Silicon Nitride Films

J. P. Luongo · Applied Spectroscopy · 1984 · 41 citations

, , +17

The electronic structure of silicon nitride

R. J. Sokel · Journal of Physics and Chemistry of Solids · 1980 · 27 citations

, , +14