Concepedia

High rate roll-to-roll atmospheric atomic layer deposition of Al 2 O 3 thin films towards gas diffusion barriers on polymers

Kamran Ali, Kyung Hyun Choi, Jeongdai Jo, Yun Woo Lee

Materials Letters · 2014 · 42 citations · 27 references

DOI

Concepts

References

27

Thin-Film Permeation-Barrier Technology for Flexible Organic Light-Emitting Devices

John S. Lewis, Michael S. Weaver · IEEE Journal of Selected Topics in Quantum Electronics · 2004 · 498 citations

, , +17

Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers

P. F. Carcia, R. Scott McLean, Michael H. Reilly et al. · Applied Physics Letters · 2006 · 429 citations

, , +17

Gas diffusion barriers on polymers using Al2O3 atomic layer deposition

Markus D. Groner, Steven M. George, R. Scott McLean et al. · Applied Physics Letters · 2006 · 392 citations

, , +17

Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al<sub>2</sub>O<sub>3</sub> and Rapid SiO<sub>2</sub> Atomic Layer Deposition

Arrelaine A. Dameron, Stephen D. Davidson, B. B. Burton et al. · The Journal of Physical Chemistry C · 2008 · 374 citations

, , +17

High‐Speed Spatial Atomic‐Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

Paul Poodt, Adriaan Lankhorst, F. Roozeboom et al. · Advanced Materials · 2010 · 319 citations

, , +15