Concepedia

Publication | Closed Access

Abnormal residual stress state in ZnO films synthesized by planar magnetron sputtering system with two facing targets

DOI

20

Citations

5

References

1999

Year

Takao Hanabusa, Hiroyoshi Hosoda, Kazuya Kusaka, Kikuo Tominaga
Thin Solid Films

References

YearCitations

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