Concepedia

Takao Hanabusa

TH

15

Publications

302

Citations

12

H-Index

1993

Active since

Affiliations

Tokushima University(Current)

National Institute of Technology, Niihama College

Japan Synchrotron Radiation Research Institute

Takao Hanabusa is an author at Tokushima University specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsThin FilmsMaterials EngineeringSurface ScienceMicrostructureMechanics Of MaterialsSolid MechanicsMicroelectronics

Publications per year

1993–2009

15

Publications

15

Residual stress and thermal stress observation in thin copper films

Takao Hanabusa, Kazuya Kusaka, Osami Sakata · Thin Solid Films · 2004 · 59 citations

Materials Science, Electromigration Technique, Engineering +8

Residual stress and its thermal relaxation in TiN films

Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi · Thin Solid Films · 1996 · 32 citations

Materials Engineering, Materials Science, Engineering +5

GaN films deposited by planar magnetron sputtering

Takuya Kikuma, Kikuo Tominaga, K Furutani et al. · Vacuum · 2002 · 26 citations

Planar Magnetron, Electrical Engineering, Engineering +5

Residual stress in TiN film deposited by arc ion plating

Tatsuya Matsue, Takao Hanabusa, Yasuhiro Miki et al. · Thin Solid Films · 1999 · 22 citations

Materials Science, Materials Engineering, Engineering +8

Abnormal residual stress state in ZnO films synthesized by planar magnetron sputtering system with two facing targets

Takao Hanabusa, Hiroyoshi Hosoda, Kazuya Kusaka et al. · Thin Solid Films · 1999 · 20 citations

Materials Engineering, Planar Magnetron, Materials Science +4

Rows per page

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