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Takuya Kikuma

TK

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Publications

3

Citations

62

H-Index

3

Active since

2001

Affiliations

Tokushima University(Current)

Takuya Kikuma is an author at Tokushima University specializing in engineering, surface science, and chemistry.

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Publications per year

2001–2002

3

Publications

3

GaN films deposited by planar magnetron sputtering

Takuya Kikuma, Kikuo Tominaga, K Furutani et al. · Vacuum · 2002 · 26 citations

, , +5

Energetic oxygen ions in the reactive sputtering of the Zr target in Ar+O2 atmosphere

Kikuo Tominaga, Takuya Kikuma · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 20 citations

, , +17

Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr

Kikuo Tominaga, Takuya Kikuma, Kazuya Kusaka et al. · Vacuum · 2002 · 16 citations

, , +12

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