Publication | Closed Access
Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr
16
Citations
5
References
2002
Year
Materials ScienceChemical EngineeringEngineeringOxidation ResistanceOxide ElectronicsSurface ScienceEnergetic Oxygen IonsHydrogenChemistryReactive SputteringZro2 DepositionChemical DepositionIon EmissionChemical Vapor DepositionElectrochemistry
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