Concepedia

Tatsuya Matsue

TM

5

Publications

95

Citations

5

H-Index

1996

Active since

Affiliations

National Institute of Technology, Niihama College(Current)

Tokushima University

Tatsuya Matsue is an author at National Institute of Technology, Niihama College specializing in applied physics, engineering, and materials science.

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Publications per year

1996–2008

5

Publications

5

Residual stress and its thermal relaxation in TiN films

Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi · Thin Solid Films · 1996 · 32 citations

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Residual stress in TiN film deposited by arc ion plating

Tatsuya Matsue, Takao Hanabusa, Yasuhiro Miki et al. · Thin Solid Films · 1999 · 22 citations

, , +8

The structure of TiN films deposited by arc ion plating

Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi · Vacuum · 2002 · 19 citations

, , +8

Dependence to processing conditions of structure in TiN films deposited by arc ion plating

Tatsuya Matsue, Takao Hanabusa, Yasukazu Ikeuchi · Vacuum · 2004 · 12 citations

, , +9

Effect of heating on the residual stresses in TiN films investigated using synchrotron radiation

Tatsuya Matsue, Takao Hanabusa, Kazuya Kusaka et al. · Vacuum · 2008 · 10 citations

, , +8

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