Concepedia
Materials Science and Engineering B · 1997 · 13 citations · 10 references
Materials ScienceEngineeringResistorSurface ScienceApplied PhysicsThin FilmsThin Film Processing
10
The preparation of cross‐section specimens for transmission electron microscopy
J. C. Bravman, Robert Sinclair · Journal of Electron Microscopy Technique · 1984 · 523 citations
Thin Film Physics, Engineering, Transmission Electron Microscopy +20
Stability of tantalum nitride thin film resistors
Chi Au, Wayne A. Anderson, D. Schmitz et al. · Journal of materials research/Pratt's guide to venture capital sources · 1990 · 71 citations
Materials Engineering, Materials Science, Engineering +4
Reactively sputtered RuO2 thin film resistor with near zero temperature coefficient of resistance
Q. X. Jia, Zhenqi Shi, K.L. Jiao et al. · Thin Solid Films · 1991 · 66 citations
Materials Science, Materials Engineering, Engineering +11
Preparation, Structure, and Properties of Sputtered, Highly Nitrided Tantalum Films
H. J. Coyne, R. N. Tauber · Journal of Applied Physics · 1968 · 47 citations
Materials Science, Materials Engineering, Crystal Structure +12
Characterization of the oxidation of tantalum nitride
A. O. Ibidunni, R. L. Masaitis, R. L. Opila et al. · Surface and Interface Analysis · 1993 · 26 citations
Engineering, Oxidation Resistance, Thin Film Process Technology +17