Statistics
Publications
122
Citations
7K
H-Index
43
Active since
1975
R. L. Opila is an author at University of Delaware specializing in materials science, natural sciences, and materials engineering.
Publications per year
1975–2023
122
122
Properties of high κ gate dielectrics Gd2O3 and Y2O3 for Si
J. Kwo, M. Hong, A. R. Kortan et al. · Journal of Applied Physics · 2001 · 262 citations
Dielectric properties of electron-beam deposited Ga2O3 films
M. Passlack, N. E. J. Hunt, E. Fred Schubert et al. · Applied Physics Letters · 1994 · 214 citations
Natural Sciences, Materials Engineering, Materials Science +15
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