Concepedia

Publication | Closed Access

Sidewall restoration of porous ultra low-k dielectrics for sub-45nm technology nodes

DOI

19

Citations

4

References

2007

Year

H. Chaabouni, L.L. Chapelon, M. Aimadeddine, J. Vitiello, A. Farcy, R. Delsol, P. Brun, Davide Fossati, V. Arnal, T. Chevolleau,
Microelectronic Engineering

References

YearCitations

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