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High-performance top and bottom double-gate low-temperature poly-silicon thin film transistors fabricated by excimer laser crystallization

Materials ScienceElectrical EngineeringEngineeringApplied PhysicsExcimer Laser CrystallizationHigh-performance TopSemiconductor Device FabricationThin Film Process TechnologySilicon On InsulatorMicroelectronicsBeyond CmosSemiconductor Device