Concepedia
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 37 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationOpticsSoft LithographyFocused Ion Beam LithographyFocused Ion Beam MachiningFocused Ion Beam Patterning
7
A Monte Carlo computer program for the transport of energetic ions in amorphous targets
J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations
Engineering, Materials Science, Physics +16
The Oxford submicron nuclear microscopy facility
G.W. Grime, M. Dawson, Michael Marsh et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 210 citations
Natural Sciences, Nuclear Engineering, Physics +5
Ion Beam Exposure of Resist Materials
Masanori Komuro, Nobufumi Atoda, Hisazo Kawakatsu · Journal of The Electrochemical Society · 1979 · 78 citations
Natural Sciences, Materials Engineering, Materials Science +16
Ion beam exposure characteristics of resists
Thomas M. Hall, Alfred Wagner, L. F. Thompson · Journal of Vacuum Science and Technology · 1979 · 74 citations
Natural Sciences, Materials Engineering, Materials Science +9
High resolution STIM
Graham Bench, G.J.F. Legge · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 54 citations