Journal of Micromechanics and Microengineering · 1999 · 31 citations · 8 references
EngineeringElectrical EngineeringMaterials ScienceActuatorsMicrofabricationPhotonicsMicromachiningOptical FibersOptical SwitchingSilicon PhotonicsThermal ActuationThermal ActuatorsFiber-optic SwitchesMechanical StabilityMicromachining Of Silicon WafersOptical SwitchesSilicon MicromachiningSilicon Wafer ProcessingSwitch Fabrication ProcessesThermal Switch Actuation
An optical (1 × 2) moving-fibre switch with bistable operation is presented. The low cost fabrication process based on bulk anisotropic Si etching for thermal actuators with cross sections of 80 × 150 µm2 is described. V-grooves are used for a precise alignment of the optical fibres. Switches and switch arrays are fabricated with high yield and high mechanical stability. An insertion loss of 2 dB including MT-connector losses and a cross talk below the detection limit (-60 dB) are measured. The thermally driven actuators operate with a power <700 mW which is, due to the bistable operation, needed for 100 ms only.
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Silicon as a mechanical material
K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations
Micromachined 1 × 2 optical-fiber switch
Leslie Field, Diane Burriesci, P. R. Robrish et al. · Sensors and Actuators A Physical · 1996 · 66 citations