Growth of high-quality and crack free AlN layers on sapphire substrate by multi-growth mode modification

Narihito Okada, N. Kato, S. Sato, T. Sumii, Takeharu Nagai, Naoki Fujimoto, Masataka Imura, K. Balakrishnan, Motoaki Iwaya, Satoshi Kamiyama,

Journal of Crystal Growth · 2006 · 76 citations · 6 references

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