Journal of Crystal Growth · 2006 · 76 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsAluminum OxidesChemical Vapor DepositionCoatingsCrystal GrowthEpitaxial GrowthSemiconductor SurfacesAluminum Gallium NitrideAluminum NitrideFilm Growth MechanismsOxide Growth KineticsOxide Layer GrowthSurface GrowthThin-film Growth Mechanisms
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