Journal of Crystal Growth · 2010 · 44 citations · 33 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor DefectsSemiconductor HeterostructuresThin Film AnnealingThin-film DepositionAnnealingAnnealing Temperature EffectsCritical ThicknessDefect DensityPost-deposition AnnealingSilicon AnnealingThin-film Growth KineticsThin-film Growth Mechanisms
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