3D characterisation of tool wear whilst diamond turning silicon

Ductile‐Regime Machining of Germanium and Silicon

Peter Blake, Ronald O. Scattergood · Journal of the American Ceramic Society · 1990 · 409 citations

Materials Science, Engineering, Material Machining +13

Ductile-regime machining model for diamond turning of brittle materials

W.S. Blackley, R.O. Scattergood · Precision Engineering · 1991 · 277 citations

Materials Science, Engineering, Material Machining +7

Surfaces in Precision Engineering, Microengineering and Nanotechnology

Leonardo De Chiffre, H. Kunzmann, G.N. Peggs et al. · CIRP Annals · 2003 · 220 citations

Engineering, Microfabrication, Nanostructured Surface +7

Some observations on the wear of diamond tools in ultra-precision cutting of single-crystal silicon

Jiwang Yan, Katsuo SYOJI, Jun’ichi TAMAKI · Wear · 2003 · 179 citations

Materials Science, Diamond-like Carbon, Engineering +12

Diamond turning of silicon substrates in ductile-regime

T.P. Leung, Wing Bun Lee, Xinying Lu · Journal of Materials Processing Technology · 1998 · 146 citations

Materials Science, Materials Engineering, Diamond-like Carbon +8