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Some observations on the wear of diamond tools in ultra-precision cutting of single-crystal silicon

Materials ScienceDiamond-like CarbonEngineeringMaterial ProcessingMicrofabricationSingle-crystal SiliconDiamond ToolsMaterial MachiningApplied PhysicsTool WearMachine ToolSolid MechanicsUltra-precision CuttingMechanics Of MaterialsMicrostructure