Publication | Closed Access
Diamond turning of silicon substrates in ductile-regime
146
Citations
5
References
1998
Year
Materials ScienceMaterials EngineeringDiamond-like CarbonEngineeringMicrofabricationApplied PhysicsDiamond TurningSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsMicrostructure
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