Publication | Closed Access
Surfaces in Precision Engineering, Microengineering and Nanotechnology
220
Citations
97
References
2003
Year
EngineeringMicrofabricationNanostructured SurfaceNanomanufacturingApplied PhysicsSurface ScienceSurface EngineeringNanolithographyNanofabricationSurface Nanoengineering
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