Concepedia

Thermal Leakage Improvement by Using a High-Work-Function Ni Electrode in High-κ TiHfO Metal–Insulator–Metal Capacitors

K.C. Chiang, Ching-Chien Huang, Han Pan, C. N. Hsiao, Jun-Ting Lin, I−Ta Hsieh, C. H. Cheng, C. P. Chou, Albert Chin, H. L. Hwang,

Journal of The Electrochemical Society · 2007 · 27 citations · 10 references

DOI

Concepts

Abstract

NRC publication: Yes

References

10

<i>Electrical Transport in Solids</i>

K. C. Kao, W-J Hwang, Sang-Il Choi · Physics Today · 1983 · 796 citations

, , +12

A high-density MIM capacitor (13 fF/μm/sup 2/) using ALD HfO<sub>2</sub> dielectrics

Xiongfei Yu, Chunxiang Zhu, Hang Hu et al. · IEEE Electron Device Letters · 2003 · 144 citations

, , +15

Investigation and modeling of the electrical properties of metal–oxide–metal structures formed from chemical vapor deposited Ta2O5 films

S. Blonkowski, M. Regache, A. Halimaoui · Journal of Applied Physics · 2001 · 106 citations

, , +17

High-Performance$hboxSrTiO_3$MIM Capacitors for Analog Applications

K.C. Chiang, C.-C. Huang, G.L. Chen et al. · IEEE Transactions on Electron Devices · 2006 · 91 citations

, , +9

Error correction techniques for high-performance differential A/D converters

Khen-Sang Tan, S. Kiriaki, M. de Wit et al. · IEEE Journal of Solid-State Circuits · 1990 · 79 citations

, , +16