A New Unconditionally Stable Algorithm for Steady-State Fluid Simulation of High Density Plasma Discharge

Numerical Heat Transfer and Fluid Flow

Chia‐Jung Hsu · Nuclear Science and Engineering · 1981 · 15.2K citations

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Two-dimensional fluid model of high density inductively coupled plasma sources

Rodney A. Stewart, P. Vitello, David B. Graves · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 145 citations

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Michael Barnes, Tina J. Cotler, M.E. Elta · Journal of Applied Physics · 1987 · 144 citations · Full text

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