Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

Micromachined inertial sensors

N. Yazdi, Farrokh Ayazi, K. Najafi · Proceedings of the IEEE · 1998 · 1.8K citations

Engineering, Electrical Engineering, Mechanical Engineering +17

PZT thin films for microsensors and actuators: Where do we stand?

Paul Muralt · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2000 · 374 citations · Full text

Engineering, Materials Engineering, Materials Science +17

A high-performance planar piezoresistive accelerometer

Aaron Partridge, J. K. Reynolds, Benjamin W. Chui et al. · Journal of Microelectromechanical Systems · 2000 · 197 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +17

Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers

Lipeng Wang, R. A. Wolf, Yu Wang et al. · Journal of Microelectromechanical Systems · 2003 · 138 citations

Engineering, Materials Engineering, Materials Science +17

An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process

N. Yazdi, K. Najafi · Journal of Microelectromechanical Systems · 2000 · 127 citations

Engineering, Electrical Engineering, Mechanical Engineering +17