Concepedia

Publication | Closed Access

Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

DOI

75

Citations

12

References

2003

Year

Han Yu, L. Zou, Kaiyun Deng, R. A. Wolf, Srinivas Tadigadapa, Susan Trolier‐McKinstry
Sensors and Actuators A Physical

References

YearCitations

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