Journal of Electronic Materials · 1991 · 18 citations · 21 references
EngineeringElectrical EngineeringMaterials ScienceSemiconductor DevicesSemiconductor MaterialsThin FilmsIii-v SemiconductorsSemiconductor Device MaterialsSemiconductor Thin FilmsWide Band Gap SemiconductorsWide-bandgap Semiconductor DevicesWide-bandgap SemiconductorsDevice FabricationDoping In Thin FilmsNitride Thin FilmsNitrides Thin FilmsSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide Power Devices
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