Vacuum · 2008 · 28 citations · 13 references
Materials ScienceEngineeringApplied PhysicsThin Film Process TechnologyThin FilmsAmorphous SolidSolar CellsPhotovoltaicsSilicon On Insulator
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SiCN thin film prepared at room temperature by r.f. reactive sputtering
Xiaonan Wu, R.Q Cai, P.X. Yan et al. · Applied Surface Science · 2002 · 69 citations