Plasma parameters of very high target power density magnetron sputtering

Magnetron sputtering: basic physics and application to cylindrical magnetrons

John A. Thornton · Journal of Vacuum Science and Technology · 1978 · 359 citations

Magnetism, Electrical Engineering, Magnetron Mode +12

Metal ion deposition from ionized mangetron sputtering discharge

S. M. Rossnagel, Jeffrey Hopwood · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 306 citations

Metal Atoms, Electrical Engineering, Engineering +14

Gas density reduction effects in magnetrons

S. M. Rossnagel · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 272 citations

Engineering, Plasma Science, Plasma Physics +19

Mechanisms for highly ionized magnetron sputtering

Jeffrey Hopwood, Fangfang Qian · Journal of Applied Physics · 1995 · 129 citations

Engineering, Plasma Physics, Magnetism +19

Induced drift currents in circular planar magnetrons

S. M. Rossnagel, H. R. Kaufman · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 96 citations

Circular Planar Magnetron, Engineering, Glow Discharge +18