Journal of Crystal Growth · 1981 · 36 citations · 5 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsSurface ScienceChemical Vapor DepositionIii-v SemiconductorsOxide SemiconductorsOxygen EvolutionSemiconductor Crystal GrowthWide-bandgap SemiconductorsLow-temperature GrowthOxide Growth KineticsOxygen Partial Pressure EffectsOxygen VacanciesOxygen Vacancy Formation
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Russell D. Dupuis, P.D. Dapkus · IEEE Journal of Quantum Electronics · 1979 · 69 citations
Effect of oxygen injection during vpe growth of GaAs Films
Lars Palm, H. Bruch, K. H. Bachem et al. · Journal of Electronic Materials · 1979 · 17 citations