Effect of dislocation scattering on the transport properties of InN grown on GaN substrates by molecular beam epitaxy

Abstract

The authors report the structural, optical, and transport properties of high quality InN epitaxial films grown on GaN substrates by plasma-assisted molecular beam epitaxy. They have found a strong correlation between the structural quality and the measured carrier mobilities. Comparison of temperature-dependent Hall data with a theoretical transport model indicates that the electron mobility in state-of-art InN is limited by charged dislocation scattering. The model predicts that an order-of-magnitude increase in electron mobilities can be achieved by the reduction of dislocation densities in InN.