Deposition of A1N thin films by magnetron reactive sputtering

Optical properties of AlN epitaxial thin films in the vacuum ultraviolet region

Hayato Yamashita, K. Fukui, S. Misawa et al. · Journal of Applied Physics · 1979 · 238 citations

Natural Sciences, Materials Science, Physics +17

Low-temperature growth of piezoelectric AlN film by rf reactive planar magnetron sputtering

Tadashi Shiosaki, Tomoko Yamamoto, Tomoyuki Oda et al. · Applied Physics Letters · 1980 · 165 citations

Natural Sciences, Materials Engineering, Materials Science +15

Epitaxial growth and piezoelectric properties of A1N, GaN, and GaAs on sapphire or spinel

M. T. Duffy, C. C. Wang, George D. O’Clock et al. · Journal of Electronic Materials · 1973 · 142 citations

Engineering, Materials Engineering, Materials Science +14

Acoustic surface wave properties of epitaxially grown aluminum nitride and gallium nitride on sapphire

George D. O’Clock, M. T. Duffy · Applied Physics Letters · 1973 · 121 citations

Natural Sciences, Materials Science, Physics +16

Growth morphology and surface-acoustic-wave measurements of AIN films on sapphire

Jingyi Liu, K.M. Lakin, K. L. Wang · Journal of Applied Physics · 1975 · 119 citations

Natural Sciences, Materials Engineering, Materials Science +16