K. I. Kirov

Deposition of A1N thin films by magnetron reactive sputtering

E. V. Gerova, Nikolay Ivanov, K. I. Kirov · Thin Solid Films · 1981 · 45 citations

Natural Sciences, Materials Engineering, Materials Science +11

A simple charge-based DLTS technique

K. I. Kirov, K. B. Radev · physica status solidi (a) · 1981 · 44 citations

Engineering, Electrical Engineering, Materials Science +17

The effect of O2 plasma on properties of the SiSiO2 system

A. Szekeres, S. Alexandrova, K. I. Kirov · physica status solidi (a) · 1980 · 26 citations

Natural Sciences, Materials Science, Physics +17

Plasma photoresist stripping in a planar reactor

A. Szekeres, K. I. Kirov, S. Alexandrova · physica status solidi (a) · 1981 · 18 citations

Natural Sciences, Chemistry, Physics +8

Properties of SiO2 films formed by oxygen implantation into silicon

K. I. Kirov, E. D. Atanasova, Silvia Alexandrova et al. · Thin Solid Films · 1978 · 15 citations

Engineering, Materials Engineering, Materials Science +12