Concepedia

E. D. Atanasova

ED

Statistics

Publications

4

Citations

51

H-Index

4

Active since

1976

Affiliations

Bulgarian Academy of Sciences(Current)

Georgi Nadjakov Institute of Solid State Physics

E. D. Atanasova is an author at Bulgarian Academy of Sciences specializing in physics, natural sciences, and surface science.

Publications per year

1976–1982

4

Publications

4

Properties of SiO2 films formed by oxygen implantation into silicon

K. I. Kirov, E. D. Atanasova, Silvia Alexandrova et al. · Thin Solid Films · 1978 · 15 citations

Engineering, Materials Engineering, Materials Science +12

Electron energy loss and Auger electron spectroscopy of ultrathin oxide films on silicon obtained in rf oxygen plasma

E. D. Atanasova, Antonio Shopov · Applications of Surface Science · 1982 · 13 citations

Natural Sciences, Materials Science, Physics +16

Formation of ultrathin oxide films on silicon in RF oxygen plasma

E. D. Atanasova, K. I. Kirov, E. I. Kantardjeva · physica status solidi (a) · 1981 · 12 citations

Natural Sciences, Materials Science, Physics +17

dc magnetron system for cathode sputtering

K. I. Kirov, N. P. Ivanov, E. D. Atanasova et al. · Vacuum · 1976 · 11 citations

Natural Sciences, Electrical Engineering, Physics +11

1–4 of 4