Concepedia

Advanced Ion Implantation Technology for High Performance Transistors

K. Suguro, Atsushi Murakoshi, Toshihiko Iinuma, Haruko Akutsu, Takeshi Shibata, Yoshikazu Sugihara, Katsuya Okumura

MRS Proceedings · 2001 · 16 citations · 2 references

DOI

Concepts

References

2

Native Defects and their Interactions with Impurities in Silicon

G. D. Watkins · MRS Proceedings · 1997 · 64 citations

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Cryo-Implantation Technology for Controlling Defects and impurity out diffusion

Atsushi Murakoshi, K. Suguro, M. Iwase et al. · MRS Proceedings · 2000 · 10 citations

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