Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals

Measurement of piezoelectric coefficients of ferroelectric thin films

K. Lefki, G. J. M. Dormans · Journal of Applied Physics · 1994 · 591 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Interferometric measurements of electric field-induced displacements in piezoelectric thin films

Andréi L. Kholkin, Ch. Wütchrich, D. V. Taylor et al. · Review of Scientific Instruments · 1996 · 414 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Nicolas Ledermann, Paul Muralt, J. Baborowski et al. · Sensors and Actuators A Physical · 2003 · 394 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

PZT thin films for microsensors and actuators: Where do we stand?

Paul Muralt · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2000 · 374 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films

M.-A. Dubois, Paul Muralt · Sensors and Actuators A Physical · 1999 · 300 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14