Effect of substrate bias on AlN thin film preparation in shielded reactive vacuum arc deposition

Epitaxially grown AlN and its optical band gap

Woosoon Yim, E. J. Stofko, P. J. Zanzucchi et al. · Journal of Applied Physics · 1973 · 593 citations

Materials Science, Aluminium Nitride, Optical Materials +14

Thermal expansion of AlN, sapphire, and silicon

Woosoon Yim, R. J. Paff · Journal of Applied Physics · 1974 · 576 citations

Materials Engineering, Materials Science, Aluminium Nitride +14

Low-temperature growth of piezoelectric AlN film by rf reactive planar magnetron sputtering

Tadashi Shiosaki, Tomoko Yamamoto, Tomoyuki Oda et al. · Applied Physics Letters · 1980 · 165 citations

Aluminium Nitride, Surface Acoustic Waves, Engineering +19

Chemical vapor deposition of aluminum and gallium nitride thin films from metalorganic precursors

David M. Hoffman, S.P. Rangarajan, Satish D. Athavale et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 50 citations

Materials Science, Aluminium Nitride, Engineering +12

Comparative study of the elastic properties of polycrystalline aluminum nitride films on silicon by Brillouin light scattering

G. Carlotti, G. Gubbiotti, F.S. Hickernell et al. · Thin Solid Films · 1997 · 45 citations

Materials Science, Aluminium Nitride, Engineering +9