Thin Solid Films · 1997 · 45 citations · 15 references
Natural SciencesMaterials SciencePhysicsMaterials CharacterizationMechanical Behavior Of MaterialsThin FilmsSemiconductor PhysicsSemiconductor Thin FilmsSilicon MaterialsThin Film Mechanical PropertiesThin-film MaterialsAluminum NitrideAnisotropy Of Elastic PropertiesBrillouin ScatteringNitride Thin FilmsNitrides Thin FilmsSilicon NitrideSilicon Thin Films
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