Comparative study of the elastic properties of polycrystalline aluminum nitride films on silicon by Brillouin light scattering - Concepedia

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Comparative study of the elastic properties of polycrystalline aluminum nitride films on silicon by Brillouin light scattering

45

Citations

15

References

1997

Year

G. Carlotti, G. Gubbiotti, F.S. Hickernell, H.M. Liaw, G. Socino

Thin Solid Films

Materials ScienceAluminium NitrideEngineeringOptical PropertiesBrillouin LightPolycrystalline AluminumApplied PhysicsOptical CeramicBrillouin ScatteringComparative StudyThin Film ProcessingMicrostructure

References

	Year	Citations

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