Publication | Closed Access
Synthesis of a-axis-oriented AlN film by a shielded reactive vacuum arc deposition method
15
Citations
15
References
1999
Year
Materials ScienceMaterials EngineeringAluminium NitrideEngineeringSurface ScienceApplied PhysicsA-axis-oriented Aln FilmVacuum DeviceChemical DepositionChemical Vapor Deposition
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