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Properties of titanium oxide film prepared by reactive cathodic vacuum arc deposition

Materials ScienceMaterials EngineeringReactive Cathodic VacuumTitanium Oxide FilmEngineeringCorrosionOxide ElectronicsSurface ScienceApplied PhysicsTitanium Dioxide MaterialsVacuum DeviceThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing