17
Publications
557
Citations
13
H-Index
1995
Active since
Sandra Gilles is an author at Forschungszentrum Jülich specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsMicrofabricationThin FilmsSurface ScienceMicroelectronicsElectrical EngineeringNanotechnologyNanoelectronics
Publications per year
1995–2013
17
17
UV nanoimprint lithography with rigid polymer molds
Sandra Gilles, M. Meier, Michael Prömpers et al. · Microelectronic Engineering · 2008 · 51 citations
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1–5 of 17