Robust adaptive tracking control of uncertain electrostatic micro-actuators with H-infinity performance

Dynamic surface control for a class of nonlinear systems

D. Swaroop, J. Karl Hedrick, Pak Yip et al. · IEEE Transactions on Automatic Control · 2000 · 2.4K citations

Engineering, Computer Systems, Dynamical Systems +14

Open-loop versus closed-loop control of MEMS devices: choices and issues

Bruno Borović, A. Q. Liu, Dan O. Popa et al. · Journal of Micromechanics and Microengineering · 2005 · 170 citations

Engineering, Mechanical Engineering, Systems Engineering +12

Control of an Electrostatic Microelectromechanical System Using Static and Dynamic Output Feedback

D. H. S. Maithripala, Jordan M. Berg, W.P. Dayawansa · Journal of Dynamic Systems Measurement and Control · 2004 · 94 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Flatness-Based Control of Electrostatically Actuated MEMS With Application to Adaptive Optics: A Simulation Study

Guchuan Zhu, Jean Lévine, Laurent Praly et al. · Journal of Microelectromechanical Systems · 2006 · 69 citations

Engineering, Mechanical Engineering, Actuators +16

Voltage and pull-in time in current drive of electrostatic actuators

Joan Pons-Nin, A. Rodrı́guez, Luís Castañer · Journal of Microelectromechanical Systems · 2002 · 60 citations

Engineering, Electrical Engineering, Actuators +16