Thin Solid Films · 2011 · 25 citations · 29 references
Natural SciencesMaterials SciencePhysicsCeramic MaterialsHeat TransferThin FilmsChemical Vapor DepositionHeat ConductionSemiconductor PhysicsThermal Properties Of MaterialsThin Film Thermal PropertiesThin-film MaterialsPlasma-assisted Chemical Vapor DepositionPlasma-enhanced Chemical Vapor DepositionPlasma-enhanced DepositionSilicon Carbide (Sic) MaterialsThermal ConductivityThermal Conductivity In PlasmasThermal Conductivity MeasurementsThin Film Thermal Transport
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