Plasma-etching fabrication and properties of black silicon by using sputtered silver nanoparticles as micromasks

Yanming Bi, Xiaodong Su, Shuai Zou, Yu Xin, Zhihua Dai, Jie Huang, Xusheng Wang, Linjun Zhang

Thin Solid Films · 2012 · 14 citations · 19 references

Concepts

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