Concepedia

Effect of nitrogen flow ratios on the microstructure and properties of (TiVCr)N coatings by reactive magnetic sputtering

Du‐Cheng Tsai, Yen‐Lin Huang, Sheng-Ru Lin, De-Ru Jung, Fuh‐Sheng Shieu

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2011 · 24 citations · 38 references

DOI

Concepts

References

38

X-Ray Diffraction Procedures for Polycrystalline and Amorphous Materials.

A. L. Patterson · Journal of the American Chemical Society · 1955 · 2.8K citations

, , +11

The microstructure of sputter‐deposited coatings

John A. Thornton · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.3K citations

, , +16

Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev

N. Laegreid, G. K. Wehner · Journal of Applied Physics · 1961 · 807 citations

, , +13

Growth of single-crystal TiN/VN strained-layer superlattices with extremely high mechanical hardness

Ulf Helmersson, Snejana V. Todorova, Scott A. Barnett et al. · Journal of Applied Physics · 1987 · 755 citations

, , +17

Reactive-sputter-deposited TiN films on glass substrates

Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations

, , +14